DOI: 10.3390/mi16010067 ISSN: 2072-666X
Editorial for the Special Issue on Micromachined Acoustic Transducers for Audio-Frequency Range
Libor Rufer, Shubham Shubham, Haoran Wang, Tom Miller, Petr Honzík, Vittorio FerrariMicroelectromechanical systems (MEMS) refer to miniaturized mechanical and electro-mechanical elements that are fabricated through microelectronic processes [...]